MEMS based sensors relevent to Smart Badge
Patents
Dissertations
- HVAC Multisensor
- Silicon
Micromachined Sensors and Actuators for Fluid-Mechanics Applications, 1996
- Silicon
Micromachined Devices for In Vivo and In Vitro Studies of Neural Networks,
1995
- Integrated
Micro Devices for Small Scale Gaseous Flow Study, 1995
- Micromechanical
Temperature Memory Sensor, 1995
- Fluid
Flow Modeling in Surface-Micromachined Electromechanical Devices, 1994
- Silicon
Pressure Sensors with PMOS Transistor Readout, 1994
- Capacitive
Absolute Pressure Sensors for Industrial Application, 1994
- Micromachined
Piezoelectric Microphones, 1994
- Plate-Wave
Biosensors, 1993
- A
Surface Micromachined Accelerometer with Integrated CMOS Detection Circuitry,
1992
- Thermal
Applications of Microbridges, 1990
- Integrated
Microphone with CMOS Circuits on a Single Chip, 1987
- Chemical
Sensors Based on Coated Ultrasonic Oscillators, 1987
- A
Silicon-Based Microsensor to Measure Airborne Contaminants, 1994
- Design
and Implementation of Sigma-Delta Force-Balance Microaccelerometers, 1994
- Gel-Coated
FPW Biosensors, 1993
- Biochemical
Microflow System / Microfabricated Optical Chopper, 1993
- High-Sensitivity
Micromechanical Electrostatic Voltmeter, 1992
- Triaxial
Monolithic Piezoresistive Accelerometers in Foundry CMOS
Commercial Sensors